
Sputtering of metals:
– Cr (Chromium) – up to 500 nm (~ 4 Å/s)
– Mo (Molybdenum) – up to 500 nm (~8 Å/s)
– W (Tungsten) – up to 500 nm (~ 5 Å/s)
– NiCr 50/50 (NickelChromium)
On request:
– B (Boron)
– Ni (Nickel)
– Co (Cobalt) – up to 500 nm (~ 4 Å/s)
Samplesize: Small samples up to 4 inch wafer, maximum thickness ~ 10 mm.
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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