Balzers BAK600

The BAK 600 is an e-beam evaporator for deposition of various materials under high vacuum conditions. The evaporator uses a high voltage electron beam for resistive heating of materials. Up to four different materials can be deposited without breaking vacuum.

System features:
– Rotation symmetric wafer mounting
– Electron gun with 4 pockets, standard layout: aluminium, chromium, gold, platinum
– Quartz crystal mass balance for deposition rate measurement
– Oil diffusion pump
– Pirani and penning vacuum gauges
– 1x mass flow controller for glow discharge processes

Substrate dimensions:
– 16x 100mm wafers
– 8x 150mm wafers