Cobra

Oxford PlasmaPro100 Cobra

– gas inlet system for pressure control and gas mixtures
– gasses; CHF3, SF6, O2, Ar, C4F8, CF4, HBr and Cl2
– 300W RIE RF generator
– 3 kW ICP RF generator
– laser interferometer end point detector
– chiller temperature range 0°C to +80°C
– LN cryo-cooled electrically-heated temperature range -100°C to +400°C
– 4” wafer clamping with helium assisted heat transfer
– vacuum system; 1400 l/s turbo pump with a dry prevacuum pump
– scrubber for toxic gases
– combined load lock system via cleanroom interface for the RIE/ICP etch Cobra and the ICPCVD system