26-02-2026

Ellipsometer

Ellipsometer VB-400 J.A. Woollam

– J.A. Woollam VB-400 variable angle spectroscopic ellipsometer (VASE)
– Woollam HS 190 monochromator
– Vertical sample mount
– Samples up to 100mm wafer
– Beam chopper is placed at the output of the monochromator
– Synchronous detection
– 293 to 1700nm
– WVASE software