SPTS Omega Synapse 200 LPX

The SPTS Synapse module is a dual-source etcher equipped with a dedicated high-density plasma (HDP) source and capacitively coupled plasma (CCP) source for etching dielectrics like SiO2, SixNy, and fused silica. Endpoint detection modules (optical emission spectroscopy and interferometry) are available to guarantee reproducible processing for etching mask layouts into SiO2 or SixNy and optical waveguide structures.