Exposure tool with Displacement Talbot Lithography (DTL) technology.
To produce sub-micron dimensioned periodic lines or holes.
Any (thin) resist that is sensitive for near-UV can be used.
A mask with submicron structures has to be supplied by the user.
Alignment is possible.
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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