Exposure tool for photoresist with UV light (Near UV range LED i-line or g-h-i-lines).
Hard and vacuum contact, flood or proximity exposure. Front to backside alignment.
Pre-alignment option for wafer bonding (anodic, Si-direct).
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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