FC20413 evaporator

Temescal FC2000 electron beam evaporator.
Available materials: Ti, Pt, Au (later Pd and Nb will be added)

Supported substrate sizes:

1. multiple piece parts,
2. up to three 2 inch wafers,
3. up to six 3 inch wafers,
4. up to four 100mm wafers.

The system has a build in Ar ion sputter gun for pre-cleaning the sample surface, to improve adhesion and contact resistance.