Maskless Direct Laser Writing aligner tool from Heidelberg Instruments.
Contains two laser sources:
– 375 nm laser
– 405 nm laser
Minimum substrate size is 5 * 5 mm2
Maximum substrate size is 6 inch (mask)
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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