Helios 5 UX

Thermo Fisher Scienctific Helios UX 5

This FIB/SEM is equipped with micromanipulators to do TEM lamella prep. It is also equipped with EDX, STEM and a SPARC detector for elemental analysis, transmission imaging and cathodoluminescence respectively. It is also equipped with an ultra-fast beam blanker capable of reacing blanking speeds of 50 ns.

• XY range: 150 mm
• Z range: 10 mm
• Rotation: 360° (endless)
• Tilt range: -10° to +60°
• XY repeatability: 1 µm
• Compucentric rotation and tilt
• Stage biasing: 0V to -4000 V
• Electron source: Elstar column with Schottky Field Electron Gun (SFEG) and ultra-fast beam blanker
• Electron beam resolution:
  • 30 kV in STEM: 0.6 nm
  • 15 kV: 0.6 nm
  • 1 kV (optimal WD): 0.7 nm
  • 1 kV (coincident point): 1.2 nm
  • 500 V with ICD detector: 1.0 nm
• Electron beam currents: 0.8 pA to 100 nA
• Electron beam acceleration voltage: 350 V to 30 kV
• Landing energy range: 20 eV to 30 keV
• FIB source: Phoenix column with gallium liquid metal ion source (Ga-LIMS)
• FIB resolution: 2.5 nm to 4.0 nm depending on method
• FIB beam currents: 1pA to 65 nA
• FIB acceleration voltage: 500 V to 30 kV
• Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
• Elstar in-column SE/BSE detector (ICD)
• Elstar in-column BSE detector (MD)
• Everhart-Thornley SE detector (ETD)
• IR camera for viewing inside chamber
• In-chamber secondary electron and secondary ion detector (ICE)
• Nav-cam
• Retractable solid-state backscatter electron detector (DBS)
• Retractable STEM 3+ detector with BF/DF/HAADF segments (STEM)
• Integrated beam current measurment
• 60 mm² x-ray detector (EDS, EDX)
• Gas injection systems:
  • C
  • SiO2
  • W
  • XeF2
• Base pressure: 2.6×10-6 mBar
• NanoBuilder software for advanced object design
• AutoScript 4 for Python based scripting
• Nanomanipulators