Metal organic vapour phase epitaxy. Showerhead principle. Growth of nanowires using gold (VLS) and catalyst free SAMOVPE.
Precursors: TMIn, TMAl, TMGa, cyclohexasilane, tertiarybutylarsine, DEZn
Gasses: PH3, AsH3, H2S, Si2H6, GeH4, HCl
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