19-09-2026

Plassys MEB750SL

(Reactive)(Co-) Evaporation using e-beam of:
Ti , TiNx, TiOx (0,5 – 2 A/s)
Al, AlOx (0,5 – 2 A/s)
Nb, NbN, NbOx (0,5 – 2 A/s)
Ta, TaN, TaOx (0,5 – 2 A/s)
Ag, (0,5 – 2 A/s)
Au,
Pd, (0,5 – 2 A/s)
Pt, (0,5 – 2 A/s)
Ge, (0,5 – 1 A/s)
Ni,
Co, (0,5 – 1 A/s)
Fe,
NiFe, (0,5 – 2 A/s)
Cr, (0,5 – 1 A/s)
NiCr,

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