Profilometer

KLA Tencor Stylus Profiler P7

– KLA Tencor stylus profiler P7
– Substrate size from 3 x 3 mm up to 150mm diameter 3 mm thickness
– 2-micron radius 60 cone degree angled tip
– 0.5 – 50 mg stylus constant force
– 150mm scan length and 1mm Z range
– Vertical resolution 0.4 nm
– Maximum horizontal resolution 25 nm
– Manual rotation stage
– 2D / 3D scanning
– Top view optical navigation camera 2 x 1.2 mm field of view
– Applications / measurementsThin film / resist step height
– Thin film / resist step height
– Surface roughness
– 3D imaging
– Flatness or curvature
– 2D stress in thin films
– 3D-Stress software package