RTA

AnnealSys AS-one 100 rapid thermal processor

• Max temperature 1450 °C
• Max hold times:
  • 30 s at 1450 °C
  • 10 minutes at 1200 °C
  • 30 minutes at 1100 °C
• Reliable temperature ranges:
  • RT – 1000 °C (using thermocouple)
  • 150 – 1100 °C (using pyrometer 2)
  • 300 – 1450 °C (using pyrometer 1)
• Max 150 °C/s ramp speed.
• Fast cooling option (uncontrolled and only without thermocouple).
• Pressure range: 5E-6 – 1000 mBar.
• Available gases:
  • Oxygen (2000 sccm)
  • Nitrogen (2000 sccm)
  • Argon (2000 sccm)
  • 5% Hydrogen in Nitrogen (1000 sccm)