S-Flex

Sputter PVD system Polyteknik S-Flex

– Polyteknik Flextura M506 S
– Sample size diameter 4” max 4mm thick
– Load lock
– Base pressure ~10-8 mbar (high vacuum; 400 l/s turbo, dry roughing pump)
– Ar sputter gas, reactive gas N2 and O2
– 4 Polyteknik 3” Magnetrons
– 300W RF power supply
– 2kW DC, uni or bipolar pulse mode power supply
– Co-evaporation
– Quartz thickness monitor
– Sample heating till 400 °C
– Sample rotation, 360°
– Shutter system for sources and sample
– Automated recipe driven software