SEM JEOL IT810

This system is delivered and accepted. expected to be delivered June 16th 2025. Before July 25th, we will try to train several of the current experienced SEM users. Training of the remainimg and new users will start after the summer holidays.

System type: JEOL JSM-IT810SIL Prime

Scanning electron microscope, 0.02-30kV, SE and BE imaging, EDS.

Supported substrate sizes:
top view: piece parts + full wafers of 2-inch, 3-inch and 100mm.
cross section: piece parts up to xxx cm (sample height when clamped vertically)