Sputterke – magnetron sputtering machine

Sputterke is a multipurpose sputter coater for deposition of conductive materials.

System features:
– Load lock
– 3x 2-inch magnetrons with eccentric alignment to the substrate
– 1x DC power supply with a switch
– Pirani, Penning vacuum gauges
– 1x argon mass flow controller, reactor inlet

Substrate dimensions:
– Maximum sample size 100 x 100 x 6 mm
– Compatible with smaller substrates