T´COathy – magnetron sputtering machine

T’COathy is a sputter coater dedicated to deposition of noble metals: Au, Pt and refractory metals: Cr, Ta and Ti. The standard target layout and user-friendly software allow for easy operation and very short lead time.

System features:
– Load lock
– 2x 2-inch magnetrons perpendicular wrt substrate for Au and Pt
– 3x 2-inch magnetrons diagonally wrt substrate for Cr, Ta, Ti
– 1x DC power supply with a switch
– Baratron, Pirani, Bayard-Alpert vacuum gauges

Substrate dimensions:
– Maximum sample size 100 x 100 x 3 mm
– Compatible with smaller samples