Tempress Systems Omega Jr | B2 – Annealing

High-temperature atmospheric furnace for dry-oxidation and annealing. Temperature range: 400°C – 1100°C. Substrates processed in this furnace may, under special conditions, be allowed in other furnace systems.
Use this furnace for:

• Ta or Ti oxidation
• densification of PECVD layers (Oxford 133)
• bonding with of doped layers
• annealing of Al layers with H2O