TOPdamper evaporator

TOPdamper is an adaptive single-wafer evaporator system. The load lock – reactor design allows for high throughput and adaptability with custom tooling.

System features:
– Load lock
– 8 pocket e-beam evaporator
– Thermal evaporator
– End-hall ion source
– Pirani, Bayard-Alpert vacuum gauges
– Argon mass flow controllers

Substrate dimensions:
– Standard holders for 4” and 6” available
– Fully compatible with smaller substrates

Allowed Materials:
– Al, Ag, Au Al2O3, Ti, Cr, Pt, Pd, Co, Ni, B. Others may be approved by the admin.