A dry etching system to etch polymers (resist, polyimide, BCB etc..). It works with a cassette system and a robot to load and unload samples. The cassettes are for 100 mm wafers, smaller pieces are loaded on a 100 mm carrier.
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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