Verios

High resolution scanning electron microscope with nanometer resolution.

– Sample size max. diameter 100 mm thickness 20 mm
– Schottky Field Electron Gun (SFEG)
– Electron Current 1pA to 22 nA
– sample landing energy range 50V- 30kV
– Electron energie monochromator for low energy spread < 0.2 eV
– 100 mm high precision 5 axis piezo stage sample
– NavCam sample navigation
– Energy Dispersive Spectroscopy (EDS) Oxford Xmax 80 mm^2 Silicon Drift Detector
– Elektron Backscatter Diffraction (EBSD) detector
– Homebuilt Electron Beam Induced Current Detector (EBIC) detector
– Plasma Cleaner
– Cryo Cleaner
– Electron detectors: ETD, TLD, MD, iCD, BSD, STEM