Xenon Difluoride Etching System
Homebuilt system
XeF2 etcher is a system to expose Si samples to XeF2 gas.
The etching is selective
Si : SiO2 => 500 : 1
Si : Si3N4=> 100: 1
MESA+ Institute
Hallenweg 15, 7522 NH
Enschede, The Netherlands
Corporate business typically refers to large-scale mansola it.
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