Geplaatst: 15 april 2026

Resists currently used in the system:
Olin 906-12
Olin 907-17
Olin 908-35

Geplaatst:

A tool for conformal coating of positive resist AZ4999 on substrates with extreme topography (holes, grooves, trenches) by means of spraying. The spraying is achieved by a nozzle which moves over the substrate.

Geplaatst: 26 februari 2026

CEE Apogee 200 Spin coater

– Flat substrates up to 200 mm or fragments
– Substrate thickness max 12 mm
– Max. spin speed 5000 rpm
– Yields uniform coating thickness up to 100 micron
– Only cleanroom standard resists are allowed!

Allowed resists only:

| Common name | Official name |
| ———– | ————- |
| CSAR 62 or just CSAR | AR-P 6200 |
| Elektra 92 or just Elektra | AR-PC 5092 |
| HSQ | XR 1541 |
| IP-G | IP-G |
| IP-L | IP-L |
| Ma-N 1400 | Ma-N 1400 |
| Ma-N 2400 | Ma-N 2400 |
| OrmoComp | OrmoComp |
| PMMA | 495 PMMA |
| PMMA | 950 PMMA |
| PMMA (imprint) | mr-I PMMA 35k |
| S1800 | Shipley S1800 |
| SU-8 | SU-8 3000 |

Explicit permission from staff member necessary for any other coating