Geplaatst: 14 maart 2026

Geplaatst:

Deep Silicon Etch
Bosch and Cryo process

Geplaatst:

Available gases are SF6(100sccm), He(100sccm), Ar(100sccm), N2(100sccm), O2(50sccm), Cl2(50sccm), BCl3(50sccm), HBr(50sccm)

Geplaatst:

Geplaatst: 11 maart 2026

The SPTS Synapse module is a dual-source etcher equipped with a dedicated high-density plasma (HDP) source and capacitively coupled plasma (CCP) source for etching dielectrics like SiO2, SixNy, and fused silica. Endpoint detection modules (optical emission spectroscopy and interferometry) are available to guarantee reproducible processing for etching mask layouts into SiO2 or SixNy and optical waveguide structures.