Geplaatst: 27 februari 2026
SPS Europe POLOS 200i spin coater
– Substrate size: 100 mm wafers
– Substrate thickness max 12 mm
– Max. spin speed 5000 rpm
– Yields uniform coating thickness up to 100 micron
– Any coating may be applied in this tool
– Mobile system, must be set-up in a wet bench before use