Geplaatst: 14 maart 2026

Geplaatst:

Fluorine based RIE system

Geplaatst:

All users please notice this: SF6 processes only on F1 tool.
(Fluoro-Carbon related processed disabled)

Geplaatst:

Deep Silicon Etch
Bosch and Cryo process

Geplaatst:

Available gases are SF6(100sccm), He(100sccm), Ar(100sccm), N2(100sccm), O2(50sccm), Cl2(50sccm), BCl3(50sccm), HBr(50sccm)