Delft

The location Delft consists of the partners Kavli NanoLab Delft, Else Kooi Lab (both at TU Delft) and TNO NanoLab Delft. This joint venture is one of the largest nanotechnology research facilities in Europe. It is unique in being the only laboratory where a national research organization and a leading technology university join forces to create the extraordinary.

Else Kooi Laboratory
Kavli Nanolab
TNO Nanolab

Else Kooi Laboratory

Delft University of Technology
Faculty of Electrical Engineering, Mathematics and Computer Science
Else Kooi Lab
Feldmannweg 17
2628 CT Delft
The Netherlands

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Kavli Nanolab

Delft University of Technology
Faculty Applied Sciences – building 22
Kavli Nanolab Delft
Lorentzweg 1
2628 CJ Delft

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TNO Nanolab

TNO Technical Sciences
Stieltjesweg 1
2628 CK Delft

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Focus areas & technologies at Delft NanoLabs

The expert technologies below are available at this location / laboratory and unlikely to be found anywhere else in the country. To make use of these techniques and facilities, you can contact the specific location / laboratory.

Characterization / metrology

Bionano imaging
Sensors
(EUV) Optics Lifetime

Lithography

Nanostructuring by charged particle beams
E-beam
Stepper with back side alignment

Etching

Deep reactive Ion Etching

Deposition

Wafer level integration

Materials / growth

Silicon & polymer integration

Integration

Fabrication of quantum devices
Nanodevice integration
Microsystems
Nanofabrication for quantum computing

Miscellaneous

Contamination control

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Locations & facilities

NanoLabNL is a Dutch national facility for nanotechnology research. Since 2003 we have been offering the use of our facilities and expertise to universities, research institutes, start-ups and industry at 5 locations in the Netherlands.

Groningen

Zernike NanoLab

Enschede

MESA+ NanoLab

Amsterdam

AMOLF NanoLab

Kavli NanoLab | Else Kooi Lab | TNO NanoLab

Eindhoven

NanoLab@TU/e

Nano technology facilities and laboratories in The Netherlands | NanoLabNL

Micro/nano MEMS, – fluidics, – electronics and – optics

Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts.

They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan and microsystem technology (MST) in Europe. (Source: Wikipedia)