We offer a range of basic and expert technologies at five locations in The Netherlands. The basic technologies (e.g. cleanrooms) provide a general infrastructure suitable for common nanofabrication activities with a low geographical threshold. These are available at any of our laboratories. Expert technologies vary per location, as detailed below.

Groningen

Enschede

Amsterdam

Delft

Eindhoven

Characterization / metrology

Micro/nano MEMS, – fluidics,
– electronics and – optics
Advanced analysis facilities
Bionano imaging
Sensors
(EUV) Optics Lifetime

Etching

Deep reactive Ion Etching
III-V etching

Lithography

Nanostructuring by charged particle beams
E-beam
Stepper with back side alignment
193 nm scanner

Miscellaneous

Contamination control

Deposition

Wafer level integration

Integration