The location Delft consists of the partners Kavli NanoLab Delft, Else Kooi Lab (both at TU Delft) and TNO NanoLab Delft. This joint venture is one of the largest nanotechnology research facilities in Europe. It is unique in being the only laboratory where a national research organization and a leading technology university join forces to create the extraordinary.

Delft University of Technology
Faculty of Electrical Engineering, Mathematics and Computer Science
Else Kooi Lab
Feldmannweg 17
2628 CT Delft
The Netherlands

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Delft University of Technology 
Faculty Applied Sciences – building 22
Kavli Nanolab Delft
Lorentzweg 1
2628 CJ Delft

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TNO Technical Sciences
Stieltjesweg 1
2628 CK Delft

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Focus areas & technologies at Delft NanoLabs

The expert technologies below are available at this location / laboratory and unlikely to be found anywhere else in the country. To make use of these techniques and facilities, you can contact the specific location / laboratory.

Characterization / metrology

Bionano imaging
Sensors
(EUV) Optics Lifetime

Lithography

Nanostructuring by charged particle beams
E-beam
Stepper with back side alignment

Etching

Deep reactive Ion Etching

Deposition

Wafer level integration

Materials / growth

Silicon & polymer integration

Integration

Fabrication of quantum devices
Nanodevice integration
Microsystems
Nanofabrication for quantum computing

Miscellaneous

Contamination control

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