We offer a range of basic and expert technologies at five locations in The Netherlands. The basic technologies (e.g. cleanrooms) provide a general infrastructure suitable for common nanofabrication activities with a low geographical threshold. These are available at any of our laboratories. Expert technologies vary per location, as detailed below.

Groningen

Enschede

Amsterdam

Delft

Eindhoven

Characterization / metrology

Micro/nano MEMS, – fluidics,
– electronics and – optics
Advanced analysis facilities
Bionano imaging
Sensors
(EUV) Optics Lifetime

Etching

Deep reactive Ion Etching
III-V etching

Lithography

Nanostructuring by charged particle beams
E-beam
Stepper with back side alignment
193 nm scanner

Miscellaneous

Contamination control

Deposition

Wafer level integration

Integration

Nano devices/materials
Fabrication of quantum devices
Nanodevice integration
Microsystems
Nanofabrication for quantum computing
Device technology for Green ICT
Nanophotonic and nanophotovoltaic
materials & devices
III-V integrated photonics

Materials / growth

2D/3D-nanostructures
Silicon & polymer integration
Organic, magnetic and semiconducting materials & devices
Growth of nanostructures and nanolayers
Quantum electronic materials
Molecular self-assembly
Optical and mechanical metamaterials
Groningen

Enschede

Amsterdam

Delft

Eindhoven

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Locations & facilities

NanoLabNL is a Dutch national facility for nanotechnology research. Since 2003 we have been offering the use of our facilities and expertise to universities, research institutes, start-ups and industry at 5 locations in the Netherlands.

Groningen

Zernike NanoLab

Enschede

MESA+ NanoLab

Amsterdam

AMOLF NanoLab

Delft

Kavli NanoLab | Else Kooi Lab | TNO NanoLab

Eindhoven

NanoLab@TU/e

Nano technology facilities and laboratories in The Netherlands | NanoLabNL