We would like to share some exciting developments that are going on at TU/e’s NanoLab. In 2023, several new equipment have become available for cleanroom users. In this news item, you will find an overview of the equipment. Besides that, ASML and TU/e announced a new phase in their longstanding partnership: there are plans for a new state-of-the-art cleanroom.
The new phase in the partnership of ASML and TU/e includes a jointly defined research program, the construction of a new ASML research facility on the TU/e campus, and the creation of a state-of-the-art cleanroom. Apart from a cleanroom of 1200 m2, it should comprise an analysis lab and a packaging lab. It is envisaged to be located on the east side of the TU/e campus.
>> Read the press release
NanoLabTUe has fully transferred it’s process line from 3” to 100 mm diameter substrates. As this wafer size is also used in the other NanoLabs, it will make the TUe process capabilities better compliant with the others and ease wafer exchange across the labs. In 2023, several new tools have become available to our users.