Due to aging of the current Ionfab 300Plus, a new IBE/RIBE system is ordered. During the tender procedure, Oxford Instruments showed to be able to fulfil our needs. Therefore, the new system is again an Ionfab 300. The new system will, besides the current IBE with Ar and RIBE with Ar/O2, also be able to perform slanted RIBE of silicon using SF6/CHF3.
Contact for more information: Henk-Willem Veltkamp